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Nucleation, crystallization and phase segregation in HfO2 and HfSiO

dc.contributor.authorMcGilvery, C.M.
dc.contributor.authorMcFadzean, S.
dc.contributor.authorDocherty, F.T.
dc.contributor.authorCraven, A.J.
dc.contributor.authorMcComb, D.W.
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-16T17:54:40Z
dc.date.available2021-10-16T17:54:40Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12568
dc.sourceIIOimport
dc.titleNucleation, crystallization and phase segregation in HfO2 and HfSiO
dc.typeProceedings paper
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage325
dc.source.endpage328
dc.source.conferenceMicroscopy of Semiconducting Materials XV
dc.source.conferencedate2/04/2007
dc.source.conferencelocationCambridge UK
imec.availabilityPublished - open access
imec.internalnotesSpringer Proceedings in Physics; Vol. 120


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