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Micro-tensile tests to characterize MEMS

dc.contributor.authorModlinski, Robert
dc.contributor.authorPuers, Bob
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-16T17:59:25Z
dc.date.available2021-10-16T17:59:25Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12583
dc.sourceIIOimport
dc.titleMicro-tensile tests to characterize MEMS
dc.typeProceedings paper
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage255
dc.source.endpage258
dc.source.conferenceTechnical Digest 20th IEEE International Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate21/01/2007
dc.source.conferencelocationKobe Japan
imec.availabilityPublished - open access


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