Show simple item record

Towards extending the capabilities of Scanning Spreading Resistance Microscopy for FinFET-based structures

dc.contributor.authorMody, Jay
dc.contributor.authorEyben, Pierre
dc.contributor.authorAugendre, Emmanuel
dc.contributor.authorRichard, Olivier
dc.contributor.authorArstila, Kai
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T17:59:43Z
dc.date.available2021-10-16T17:59:43Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12584
dc.sourceIIOimport
dc.titleTowards extending the capabilities of Scanning Spreading Resistance Microscopy for FinFET-based structures
dc.typeOral presentation
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewno
dc.source.conferenceInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling
dc.source.conferencedate6/05/2007
dc.source.conferencelocationNapa, CA USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record