Stress-induced mobility enhancement for integrated power transistors

Metadata

Show full item record

Authors

Moens, Paul; Roig, J.; Clemente, Francesca; De Wolf, Ingrid; Desoete, B.; Bauwens, F.; Tack, M.

Conference

Technical Digest International Electron Devices Meeting - IEDM

Title

Stress-induced mobility enhancement for integrated power transistors

Publication type

Proceedings paper

Collections

Conference contributions