Formation of porous alumina patterns on silicon

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Authors
Moral Vico, Antonio Javier; Jansen, Frederik; Groeseneken, Guido; Maex, Karen; Vereecken, Philippe
Conference
Electrochemical Deposition on Non-Metallic Surfaces, Patterned Substrates, and Templates
Title
Formation of porous alumina patterns on silicon
Publication type
Proceedings paper
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