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Titaniuim nitride growth by sputtering for contacts on boron doped diamond

dc.contributor.authorMortet, V.
dc.contributor.authorElmazria, O.
dc.contributor.authorDeferme, W.
dc.contributor.authorDaenen, M.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorLazea, A.
dc.contributor.authorMorel, A.
dc.contributor.authorHaenen, Ken
dc.contributor.authorD'Olieslaeger, Marc
dc.date.accessioned2021-10-16T18:03:57Z
dc.date.available2021-10-16T18:03:57Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12598
dc.sourceIIOimport
dc.titleTitaniuim nitride growth by sputtering for contacts on boron doped diamond
dc.typeJournal article
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHaenen, Ken
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.beginpageS139
dc.source.endpageS143
dc.source.journalProcesses and Polymers
dc.source.issueS1
dc.source.volume4
imec.availabilityPublished - imec


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