Titaniuim nitride growth by sputtering for contacts on boron doped diamond

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Authors

Mortet, V.; Elmazria, O.; Deferme, W.; Daenen, M.; D'Haen, Jan; Lazea, A.; Morel, A.; Haenen, Ken; D'Olieslaeger, Marc

Issue

S1

Journal

Processes and Polymers

Volume

4

Title

Titaniuim nitride growth by sputtering for contacts on boron doped diamond

Publication type

Journal article

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