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Titaniuim nitride growth by sputtering for contacts on boron doped diamond
Publication:
Titaniuim nitride growth by sputtering for contacts on boron doped diamond
Date
2007
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mortet, V.
;
Elmazria, O.
;
Deferme, W.
;
Daenen, M.
;
D'Haen, Jan
;
Lazea, A.
;
Morel, A.
;
Haenen, Ken
;
D'Olieslaeger, Marc
Journal
Processes and Polymers
Abstract
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1910
since deposited on 2021-10-16
416
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1910
since deposited on 2021-10-16
416
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations