Publication:

Titaniuim nitride growth by sputtering for contacts on boron doped diamond

Date

2007
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorMortet, V.
dc.contributor.authorElmazria, O.
dc.contributor.authorDeferme, W.
dc.contributor.authorDaenen, M.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorLazea, A.
dc.contributor.authorMorel, A.
dc.contributor.authorHaenen, Ken
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHaenen, Ken
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.accessioned2021-10-16T18:03:57Z
dc.date.available2021-10-16T18:03:57Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12598
dc.source.beginpageS139
dc.source.endpageS143
dc.source.issueS1
dc.source.journalProcesses and Polymers
dc.source.volume4
dc.title

Titaniuim nitride growth by sputtering for contacts on boron doped diamond

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles