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RF MEM resonators: modeling resonance frequencies

dc.contributor.authorNada, Yasseen
dc.contributor.authorStoffels, Steve
dc.contributor.authorTilmans, Harrie
dc.contributor.authorHegazi, E.
dc.contributor.authorRagai, H.F.
dc.contributor.authorShaarawi, A.M.
dc.date.accessioned2021-10-16T18:06:44Z
dc.date.available2021-10-16T18:06:44Z
dc.date.issued2007-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12607
dc.sourceIIOimport
dc.titleRF MEM resonators: modeling resonance frequencies
dc.typeProceedings paper
dc.contributor.imecauthorStoffels, Steve
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.conferenceMicromechanics Europe 2007
dc.source.conferencedate16/09/2007
dc.source.conferencelocationGuimaraes Portugal
imec.availabilityPublished - imec


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