dc.contributor.author | O'Connor, Robert | |
dc.contributor.author | Pantisano, Luigi | |
dc.contributor.author | Degraeve, Robin | |
dc.contributor.author | Kauerauf, Thomas | |
dc.contributor.author | Kaczer, Ben | |
dc.contributor.author | Roussel, Philippe | |
dc.contributor.author | Groeseneken, Guido | |
dc.date.accessioned | 2021-10-16T18:14:26Z | |
dc.date.available | 2021-10-16T18:14:26Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12631 | |
dc.source | IIOimport | |
dc.title | Electron energy dependence of defect generation in high-k gate stacks | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Degraeve, Robin | |
dc.contributor.imecauthor | Kaczer, Ben | |
dc.contributor.imecauthor | Roussel, Philippe | |
dc.contributor.imecauthor | Groeseneken, Guido | |
dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
dc.contributor.orcidimec | Roussel, Philippe::0000-0002-0402-8225 | |
dc.source.peerreview | no | |
dc.source.conference | 38th IEEE Semiconductor Interface Specialists Conference | |
dc.source.conferencedate | 5/12/2007 | |
dc.source.conferencelocation | Washington, DC USA | |
imec.availability | Published - imec | |