Strained Si/SiGe MOS technology

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Authors
Olsen, S.; Yan, L.; Agaiby, R.; Escobedo-Cousin, E.; O'Neill, A.G.; Hellstrom, P.-E.; Ostling, M.; Lyutovich, L.; Kasper, E.; Claeys, Cor; Parker, E.H.C.
Conference
4th International Symposium on Advanced Gate Stack technology
Title
Strained Si/SiGe MOS technology
Publication type
Oral presentation
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