Influence of STI trench fill and dummy design on CMP behavior

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Authors

Ong, Patrick; Devriendt, Katia; Redolfi, Augusto; Okuno, Yasutoshi; Hernandez, Jose Luis

Conference

International Conference on Planarization / CMP Technology - ICPT

Title

Influence of STI trench fill and dummy design on CMP behavior

Publication type

Proceedings paper

Collections

Conference contributions