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A novel plasma-assisted shrink process to enlarge process windows of narrow trenches and contacts for 45-nm node applications and beyond
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1937 since deposited on 2021-10-16
2last month
Acq. date: 2026-01-09
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Metrics
Views
1937 since deposited on 2021-10-16
2last month
Acq. date: 2026-01-09
Citations