Ni-germanide contacts on Ge: phase formation and electrical characterization

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Authors
Opsomer, Karl; Simoen, Eddy; Detavernier, C.; Lauwers, Anne; Lavoie, C.; Van Meirhaeghe, R.L.; Maex, Karen
Conference
MRS Spring Meeting Symposium G: Extending Moore's Law with Alternative Channel Materials
Title
Ni-germanide contacts on Ge: phase formation and electrical characterization
Publication type
Oral presentation
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