Evaluation of triple-gate FinFETs with SiO2-HfO2-TiN gate stack under analog operation

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Authors

Pavanello, M.A.; Martino, J.A.; Simoen, Eddy; Rooyackers, Rita; Collaert, Nadine; Claeys, Cor

Issue

2

Journal

Solid-State Electronics

Volume

51

Title

Evaluation of triple-gate FinFETs with SiO2-HfO2-TiN gate stack under analog operation

Publication type

Journal article

Embargo date

9999-12-31

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