dc.contributor.author | Philipsen, Vicky | |
dc.contributor.author | Mesuda, Kei | |
dc.contributor.author | De Bisschop, Peter | |
dc.contributor.author | Erdmann, Andreas | |
dc.contributor.author | Citarella, Giuseppe | |
dc.contributor.author | Evanschitzky, Peter | |
dc.contributor.author | Birkner, Robert | |
dc.contributor.author | Richter, Rigo | |
dc.contributor.author | Scherübl, Thomas | |
dc.date.accessioned | 2021-10-16T18:37:34Z | |
dc.date.available | 2021-10-16T18:37:34Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12703 | |
dc.source | IIOimport | |
dc.title | Impact of alternative mask stacks on the imaging performance at NA 1.20 and above | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Philipsen, Vicky | |
dc.contributor.imecauthor | De Bisschop, Peter | |
dc.contributor.orcidimec | Philipsen, Vicky::0000-0002-2959-432X | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 67301N | |
dc.source.conference | SPIE Photomask Technology (BACUS) | |
dc.source.conferencedate | 18/09/2007 | |
dc.source.conferencelocation | Monterey, CA USA | |
imec.availability | Published - open access | |
imec.internalnotes | SPIE proceedings, vol.6730 | |