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Unified Fe calculations of stresses in locos, stripes and quantum device heterostructures

dc.contributor.authorJain, Suresh
dc.contributor.authorPinardi, Kuntjoro
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-09-29T14:35:50Z
dc.date.available2021-09-29T14:35:50Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1274
dc.sourceIIOimport
dc.titleUnified Fe calculations of stresses in locos, stripes and quantum device heterostructures
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage3
dc.source.endpage10
dc.source.conferenceSemiconductor Devices
dc.source.conferencedate11/12/1996
dc.source.conferencelocationNew Delhi India
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 2733


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