Authors

Ragnarsson, Lars-Ake; Chang, Vincent; Yu, HongYu; Cho, Hag-Ju; Conard, Thierry; Yin, KaiMin; Delabie, Annelies; Swerts, Johan; Schram, Tom; De Gendt, Stefan; Biesemans, Serge

Issue

6

Journal

IEEE Electron Device Letters

Volume

28

Title

Achieving conduction band-edge effective work functions by La2O3 capping of hafnium silicates

Publication type

Journal article