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Strained silicon-on-insulator : fabrication and characterization

dc.contributor.authorReiche, M.
dc.contributor.authorHimcinschi, C.
dc.contributor.authorGoesele, U.
dc.contributor.authorChristiansen, S.
dc.contributor.authorMantl, S.
dc.contributor.authorBuca, D.
dc.contributor.authorZhao, Q. T.
dc.contributor.authorFeste, S.
dc.contributor.authorLoo, Roger
dc.contributor.authorNguyen, Duy
dc.contributor.authorBuchholtz, W.
dc.contributor.authorWei, A.
dc.contributor.authorHorstmann, D.
dc.contributor.authorFeijoo, D.
dc.contributor.authorStorck, P.
dc.date.accessioned2021-10-16T19:00:21Z
dc.date.available2021-10-16T19:00:21Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12773
dc.sourceIIOimport
dc.titleStrained silicon-on-insulator : fabrication and characterization
dc.typeProceedings paper
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.beginpage339
dc.source.endpage344
dc.source.conferenceSilicon-on-Insulator Technology and Devices 13
dc.source.conferencedate6/05/2007
dc.source.conferencelocationChicago, IL USA
dc.identifier.urlhttp://www.ecsdl.org/getabs/servlet/GetabsServlet?prog=normal&id=ECSTF8000006000004000339000001&idtype=cvips&gifs=Yes
imec.availabilityPublished - imec
imec.internalnotesECS Transactions; Vol. 6; Issue 4


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