dc.contributor.author | Renaud, Michael | |
dc.contributor.author | Sterken, Tom | |
dc.contributor.author | Schmitz, Andreas | |
dc.contributor.author | Fiorini, Paolo | |
dc.contributor.author | Van Hoof, Chris | |
dc.contributor.author | Puers, Bob | |
dc.date.accessioned | 2021-10-16T19:01:00Z | |
dc.date.available | 2021-10-16T19:01:00Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12775 | |
dc.source | IIOimport | |
dc.title | Piezoelectic harvesters and MEMS technology: fabrication, modeling and measurements | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Sterken, Tom | |
dc.contributor.imecauthor | Van Hoof, Chris | |
dc.contributor.imecauthor | Puers, Bob | |
dc.source.peerreview | no | |
dc.source.beginpage | 891 | |
dc.source.endpage | 894 | |
dc.source.conference | Transducers & Eurosensors '07: The 14th International Conference onSolid-State Sensors, Actuators and Microsystems | |
dc.source.conferencedate | 10/06/2007 | |
dc.source.conferencelocation | Lyon France | |
imec.availability | Published - imec | |