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Tomographic analysis of a FINFET structures

dc.contributor.authorRichard, Olivier
dc.contributor.authorKalio, Andre
dc.contributor.authorBender, Hugo
dc.contributor.authorSourty, Erwan
dc.date.accessioned2021-10-16T19:01:38Z
dc.date.available2021-10-16T19:01:38Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12777
dc.sourceIIOimport
dc.titleTomographic analysis of a FINFET structures
dc.typeProceedings paper
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage375
dc.source.endpage378
dc.source.conferenceMicroscopy of Semiconducting Materials XV
dc.source.conferencedate2/04/2007
dc.source.conferencelocationCambridge UK
imec.availabilityPublished - open access
imec.internalnotesSpringer Proceedings in Physics; Vol. 120


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