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Optimization of HfSiON using a design of experiment (DOE) approach

dc.contributor.authorRothschild, Aude
dc.contributor.authorMitsuhashi, Riichirou
dc.contributor.authorKerner, Christoph
dc.contributor.authorShi, Xiaoping
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorDate, Lucien
dc.contributor.authorConard, Thierry
dc.contributor.authorRichard, Olivier
dc.contributor.authorVrancken, Evi
dc.contributor.authorVerbeeck, Rita
dc.contributor.authorVeloso, Anabela
dc.contributor.authorLauwers, Anne
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorJurczak, Gosia
dc.contributor.authorNiwa, Masaaki
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBiesemans, Serge
dc.date.accessioned2021-10-16T19:11:35Z
dc.date.available2021-10-16T19:11:35Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12807
dc.sourceIIOimport
dc.titleOptimization of HfSiON using a design of experiment (DOE) approach
dc.typeJournal article
dc.contributor.imecauthorKerner, Christoph
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorDate, Lucien
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVrancken, Evi
dc.contributor.imecauthorVerbeeck, Rita
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewno
dc.source.beginpage521
dc.source.endpage524
dc.source.journalMicroelectronics Reliability
dc.source.issue4_5
dc.source.volume47
imec.availabilityPublished - imec
imec.internalnotesPaper from WoDiM 2006


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