Optimization of HfSiON using a design of experiment (DOE) approach

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Authors

Rothschild, Aude; Mitsuhashi, Riichirou; Kerner, Christoph; Shi, Xiaoping; Everaert, Jean-Luc; Date, Lucien; Conard, Thierry; Richard, Olivier; Vrancken, Evi; Verbeeck, Rita; Veloso, Anabela; Lauwers, Anne; de Potter de ten Broeck, Muriel; Debusschere, Ingrid; Jurczak, Gosia; Niwa, Masaaki; Absil, Philippe; Biesemans, Serge

Issue

4_5

Journal

Microelectronics Reliability

Volume

47

Title

Optimization of HfSiON using a design of experiment (DOE) approach

Publication type

Journal article

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