Optimization of HfSiON using a design of experiment (DOE) approach

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Author(s)

Rothschild, Aude

;

Mitsuhashi, Riichirou

;

Kerner, Christoph

;

;

Everaert, Jean-Luc

;

;

Conard, Thierry

;

Richard, Olivier

;

;

;

Veloso, Anabela

;

;

de Potter de ten Broeck, Muriel

;

Debusschere, Ingrid

;

;

;

Absil, Philippe

;

Biesemans, Serge

Journal

Microelectronics Reliability

Metrics

1959 since deposited on 2021-10-16

Acq. date: 2025-10-23