Publication:

Optimization of HfSiON using a design of experiment (DOE) approach

Date

2007
Journal article
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dc.contributor.authorRothschild, Aude
dc.contributor.authorMitsuhashi, Riichirou
dc.contributor.authorKerner, Christoph
dc.contributor.authorShi, Xiaoping
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorDate, Lucien
dc.contributor.authorConard, Thierry
dc.contributor.authorRichard, Olivier
dc.contributor.authorVrancken, Evi
dc.contributor.authorVerbeeck, Rita
dc.contributor.authorVeloso, Anabela
dc.contributor.authorLauwers, Anne
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorJurczak, Gosia
dc.contributor.authorNiwa, Masaaki
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBiesemans, Serge
dc.contributor.imecauthorKerner, Christoph
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorDate, Lucien
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVrancken, Evi
dc.contributor.imecauthorVerbeeck, Rita
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.date.accessioned2021-10-16T19:11:35Z
dc.date.available2021-10-16T19:11:35Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12807
dc.source.beginpage521
dc.source.endpage524
dc.source.issue4_5
dc.source.journalMicroelectronics Reliability
dc.source.volume47
dc.title

Optimization of HfSiON using a design of experiment (DOE) approach

dc.typeJournal article
dspace.entity.typePublication
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