Actionneurs électrostatiques pour les MEMS
dc.contributor.author | Rottenberg, Xavier | |
dc.date.accessioned | 2021-10-16T19:12:19Z | |
dc.date.available | 2021-10-16T19:12:19Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12809 | |
dc.source | IIOimport | |
dc.title | Actionneurs électrostatiques pour les MEMS | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Rottenberg, Xavier | |
dc.contributor.orcidimec | Rottenberg, Xavier::0000-0003-0920-1709 | |
dc.source.peerreview | no | |
dc.source.conference | Troisième Journée du GT "Manipulation multi-échelle" | |
dc.source.conferencedate | 28/09/2007 | |
dc.source.conferencelocation | Marseille France | |
imec.availability | Published - imec |
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