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An electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin-film RF-MEMS technology

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorBrebels, Steven
dc.contributor.authorEkkels, Phillip
dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorNolmans, Philip
dc.contributor.authorMertens, Robert
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorPuers, Bob
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-16T19:12:43Z
dc.date.available2021-10-16T19:12:43Z
dc.date.issued2007-07
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12810
dc.sourceIIOimport
dc.titleAn electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin-film RF-MEMS technology
dc.typeJournal article
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorBrebels, Steven
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorNolmans, Philip
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecBrebels, Steven::0000-0002-1568-0286
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpageS204
dc.source.endpageS210
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue7
dc.source.volume17
imec.availabilityPublished - imec


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