Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Articles
View item
imec Publications Repository
imec Publications
Articles
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
An electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin-film RF-MEMS technology
Metadata
Show full item record
Authors
Rottenberg, Xavier
;
Brebels, Steven
;
Ekkels, Phillip
;
Czarnecki, Piotr
;
Nolmans, Philip
;
Mertens, Robert
;
Nauwelaers, Bart
;
Puers, Bob
;
De Wolf, Ingrid
;
De Raedt, Walter
;
Tilmans, Harrie
Issue
7
Journal
Journal of Micromechanics and Microengineering
Volume
17
Title
An electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin-film RF-MEMS technology
Publication type
Journal article
Collections
Articles
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login