Publication:

An electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin-film RF-MEMS technology

Date

2007-07
Journal article
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Author(s)

Rottenberg, Xavier  
;
Brebels, Steven  
;
Ekkels, Phillip
;
Czarnecki, Piotr  
;
Nolmans, Philip  
;
Mertens, Robert  
;
Nauwelaers, Bart  
;
Puers, Bob  
;
De Wolf, Ingrid  
;
De Raedt, Walter  
;
Tilmans, Harrie  

Journal

Journal of Micromechanics and Microengineering

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1908 since deposited on 2021-10-16
Acq. date: 2025-12-15

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1908 since deposited on 2021-10-16
Acq. date: 2025-12-15

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