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An electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin-film RF-MEMS technology

Date

2007-07
Journal article
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dc.contributor.authorRottenberg, Xavier
dc.contributor.authorBrebels, Steven
dc.contributor.authorEkkels, Phillip
dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorNolmans, Philip
dc.contributor.authorMertens, Robert
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorPuers, Bob
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorBrebels, Steven
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorNolmans, Philip
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecBrebels, Steven::0000-0002-1568-0286
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-16T19:12:43Z
dc.date.available2021-10-16T19:12:43Z
dc.date.issued2007-07
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12810
dc.source.beginpageS204
dc.source.endpageS210
dc.source.issue7
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.volume17
dc.title

An electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin-film RF-MEMS technology

dc.typeJournal article
dspace.entity.typePublication
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