dc.contributor.author | Rottenberg, Xavier | |
dc.contributor.author | Nolmans, Philip | |
dc.contributor.author | Ekkels, Phillip | |
dc.contributor.author | Czarnecki, Piotr | |
dc.contributor.author | Mertens, Robert | |
dc.contributor.author | Nauwelaers, Bart | |
dc.contributor.author | De Wolf, Ingrid | |
dc.contributor.author | De Raedt, Walter | |
dc.contributor.author | Tilmans, Harrie | |
dc.date.accessioned | 2021-10-16T19:14:14Z | |
dc.date.available | 2021-10-16T19:14:14Z | |
dc.date.issued | 2007-01 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12814 | |
dc.source | IIOimport | |
dc.title | Electrostatic fringing-field actuator (EFFA): application towards a low-complexity RF-MEMS technology | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Rottenberg, Xavier | |
dc.contributor.imecauthor | Nolmans, Philip | |
dc.contributor.imecauthor | Czarnecki, Piotr | |
dc.contributor.imecauthor | Mertens, Robert | |
dc.contributor.imecauthor | Nauwelaers, Bart | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.imecauthor | De Raedt, Walter | |
dc.contributor.imecauthor | Tilmans, Harrie | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.contributor.orcidimec | De Raedt, Walter::0000-0002-7117-7976 | |
dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 203 | |
dc.source.endpage | 206 | |
dc.source.conference | Technical Digest 20th IEEE International Conference on Micro Electro Mechanical Systems - MEMS | |
dc.source.conferencedate | 21/01/2007 | |
dc.source.conferencelocation | Kobe Japan | |
imec.availability | Published - imec | |