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Electrical characterization and special properties of FinFET structures

dc.contributor.authorRudenko, Tamara
dc.contributor.authorKilchytska, Valeria
dc.contributor.authorCollaert, Nadine
dc.contributor.authorNazarov, A.
dc.contributor.authorJurczak, Gosia
dc.contributor.authorFlandre, Denis
dc.date.accessioned2021-10-16T19:15:57Z
dc.date.available2021-10-16T19:15:57Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12819
dc.sourceIIOimport
dc.titleElectrical characterization and special properties of FinFET structures
dc.typeProceedings paper
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.source.peerreviewno
dc.source.beginpage199
dc.source.endpage220
dc.source.conferenceNanoscaled Semiconductor-on-Insulator Structures and Devices. Proceedings of the NATO Advanced Research Workshop
dc.source.conferencedate15/10/2006
dc.source.conferencelocationYalta Ukraine
imec.availabilityPublished - imec
imec.internalnotesNATO Science for Peace and Security Series B: Physics and Biophysics


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