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UV-based nano imprint fabrication of gold grating couplers on silicon-on-insulator

dc.contributor.authorScheerlinck, Stijn
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-16T19:26:55Z
dc.date.available2021-10-16T19:26:55Z
dc.date.issued2007-07
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12851
dc.sourceIIOimport
dc.titleUV-based nano imprint fabrication of gold grating couplers on silicon-on-insulator
dc.typeProceedings paper
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage82
dc.source.endpage93
dc.source.conferenceDigest of the LEOS Summer Topical Meetings
dc.source.conferencedate23/07/2007
dc.source.conferencelocationPortland, OR USA
imec.availabilityPublished - open access


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