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Focused ion beam fabrication of photonic structuresin silicon-on-insulator

dc.contributor.authorSchrauwen, Jonathan
dc.date.accessioned2021-10-16T19:32:00Z
dc.date.available2021-10-16T19:32:00Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12866
dc.sourceIIOimport
dc.titleFocused ion beam fabrication of photonic structuresin silicon-on-insulator
dc.typeOral presentation
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceePIXnet Winter School '07, Applications of Photonic Integration
dc.source.conferencedate11/03/2007
dc.source.conferencelocationPontresina Switzerland
imec.availabilityPublished - open access
imec.internalnotesposter nr. 51


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