Deposited silicon-on-insulation material technology for photonic integrated circuitry

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Authors
Selvaraja, Shankar; Bogaerts, Wim; Van Thourhout, Dries; Baets, Roel; Sleeckx, Erik; Schaekers, Marc
Conference
Proceedings 12th Annual Symposium of the IEEE/LEOS Benelux Chapter
Title
Deposited silicon-on-insulation material technology for photonic integrated circuitry
Publication type
Proceedings paper
Embargo date
9999-12-31
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