Show simple item record

Scaling down of MOCVD HfSiON to 1nm EOT

dc.contributor.authorShi, Xiaoping
dc.contributor.authorRothschild, Aude
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorDate, Lucien
dc.contributor.authorSchaekers, Marc
dc.date.accessioned2021-10-16T19:39:14Z
dc.date.available2021-10-16T19:39:14Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12887
dc.sourceIIOimport
dc.titleScaling down of MOCVD HfSiON to 1nm EOT
dc.typeMeeting abstract
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorDate, Lucien
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.source.peerreviewyes
dc.source.conferenceMeeting Abstracts 212th ECS Fall Meeting
dc.source.conferencedate7/10/2007
dc.source.conferencelocationWashington, DC USA
imec.availabilityPublished - imec
imec.internalnotesMeeting Abstracts; Vol. MA 2007-02


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record