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Fabrication of plasmonic resonant antennas by FIB and electron beam lithography

dc.contributor.authorSikola, Tomas
dc.contributor.authorKekatpure, R.D.
dc.contributor.authorVan Dorpe, Pol
dc.contributor.authorPala, R.A.
dc.contributor.authorBartosik, M.
dc.contributor.authorTomanec, O.
dc.contributor.authorBrongersma, Mark
dc.date.accessioned2021-10-16T19:43:07Z
dc.date.available2021-10-16T19:43:07Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12897
dc.sourceIIOimport
dc.titleFabrication of plasmonic resonant antennas by FIB and electron beam lithography
dc.typeOral presentation
dc.contributor.imecauthorVan Dorpe, Pol
dc.contributor.orcidimecVan Dorpe, Pol::0000-0003-0918-1664
dc.source.peerreviewno
dc.source.conference17th International Vacuum Congress
dc.source.conferencedate2/07/2007
dc.source.conferencelocationStockholm Sweden
imec.availabilityPublished - imec


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