Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Removal of organic contamination from silicon surfaces
Publication:
Removal of organic contamination from silicon surfaces
Copy permalink
Date
1996
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
1267.pdf
154.72 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kenens, Conny
;
Storm, Wolfgang
;
Knotter, D. M.
;
De Gendt, Stefan
;
Vandervorst, Wilfried
;
Heyns, Marc
Journal
Abstract
Description
Metrics
Views
1971
since deposited on 2021-09-29
1
last month
Acq. date: 2026-01-07
Citations
Metrics
Views
1971
since deposited on 2021-09-29
1
last month
Acq. date: 2026-01-07
Citations