Authors

Kenens, Conny; Storm, Wolfgang; Knotter, D. M.; De Gendt, Stefan; Vandervorst, Wilfried; Heyns, Marc

Conference

Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS

Title

Removal of organic contamination from silicon surfaces

Publication type

Proceedings paper

Embargo date

9999-12-31