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Influence of ultra low-k material properties on post direct CMP damage

dc.contributor.authorSinapi, Fabrice
dc.contributor.authorTravaly, Youssef
dc.contributor.authorHeylen, Nancy
dc.contributor.authorVereecke, Guy
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorHernandez, Jose Luis
dc.contributor.authorBeyer, Gerald
dc.contributor.authorLytle, S
dc.contributor.authorFischer, P
dc.contributor.authorCockburn, A
dc.contributor.authorSantoro, G
dc.contributor.authorNguyen, O
dc.date.accessioned2021-10-16T19:48:45Z
dc.date.available2021-10-16T19:48:45Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12913
dc.sourceIIOimport
dc.titleInfluence of ultra low-k material properties on post direct CMP damage
dc.typeMeeting abstract
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHernandez, Jose Luis
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference - AMC
dc.source.conferencedate9/10/2007
dc.source.conferencelocationAlbany, NY USA
imec.availabilityPublished - imec


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