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Nanoscale imaging and metrology of devices and innovative materials

dc.contributor.authorSpinella, C.
dc.contributor.authorRaineri, V.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorCiappa, M.
dc.date.accessioned2021-10-16T19:56:42Z
dc.date.available2021-10-16T19:56:42Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12936
dc.sourceIIOimport
dc.titleNanoscale imaging and metrology of devices and innovative materials
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage375
dc.source.journalMicroelectronic Engineering
dc.source.issue3
dc.source.volume84
imec.availabilityPublished - imec


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