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Articles
Nanoscale imaging and metrology of devices and innovative materials
Publication:
Nanoscale imaging and metrology of devices and innovative materials
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Date
2007
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Spinella, C.
;
Raineri, V.
;
Vandervorst, Wilfried
;
Ciappa, M.
Journal
Microelectronic Engineering
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1915
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Acq. date: 2025-12-11
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Metrics
Views
1915
since deposited on 2021-10-16
1
last month
1
last week
Acq. date: 2025-12-11
Citations