Publication:
Nanoscale imaging and metrology of devices and innovative materials
Date
| dc.contributor.author | Spinella, C. | |
| dc.contributor.author | Raineri, V. | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Ciappa, M. | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-16T19:56:42Z | |
| dc.date.available | 2021-10-16T19:56:42Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12936 | |
| dc.source.beginpage | 375 | |
| dc.source.issue | 3 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 84 | |
| dc.title | Nanoscale imaging and metrology of devices and innovative materials | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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