Show simple item record

Impact of line-edge roughness on resistance and capacitance of scaled interconnects

dc.contributor.authorStucchi, Michele
dc.contributor.authorBamal, Mandeep
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T20:03:51Z
dc.date.available2021-10-16T20:03:51Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12957
dc.sourceIIOimport
dc.titleImpact of line-edge roughness on resistance and capacitance of scaled interconnects
dc.typeJournal article
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage2733
dc.source.endpage2737
dc.source.journalMicroelectronic Engineering
dc.source.issue11
dc.source.volume84
imec.availabilityPublished - imec
imec.internalnotesPaper from MAM 2007


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record