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Articles
Impact of line-edge roughness on resistance and capacitance of scaled interconnects
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Impact of line-edge roughness on resistance and capacitance of scaled interconnects
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Date
2007
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Stucchi, Michele
;
Bamal, Mandeep
;
Maex, Karen
Journal
Microelectronic Engineering
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Views
1860
since deposited on 2021-10-16
1
last month
1
last week
Acq. date: 2026-02-25
Citations