Publication:
Impact of line-edge roughness on resistance and capacitance of scaled interconnects
Date
| dc.contributor.author | Stucchi, Michele | |
| dc.contributor.author | Bamal, Mandeep | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Stucchi, Michele | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-16T20:03:51Z | |
| dc.date.available | 2021-10-16T20:03:51Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12957 | |
| dc.source.beginpage | 2733 | |
| dc.source.endpage | 2737 | |
| dc.source.issue | 11 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 84 | |
| dc.title | Impact of line-edge roughness on resistance and capacitance of scaled interconnects | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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