Authors

Su, Jiale; Vullers, Ruud; Goedbloed, Martijn; van Andel, Yvonne; Pellens, Rudy; Gui, C.Q.; Leonov, Vladimir; Wang, Ziyang

Conference

PowerMEMS. The 7th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

Title

Stepper lithography on large-topography microstructures for thermoelectric energy scavengers

Publication type

Proceedings paper

Embargo date

9999-12-31