Publication:

Grown-in defect density spectra in czochralski silicon wafers

Date

1996

Presentation

Simple item page Full metadata Statistics

Files

1274.pdf 287.16 KB

Author(s)

Kissinger, G.

;

Gräf, D.

;

Lambert, U.

;

Vanhellemont, Jan

;

Richter, H.

Statistics

1966 since deposited on 2021-09-29

Acq. date: 2026-02-26