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Metal oxide thin films by CSD of water-based solutions of carboxylate complexes

dc.contributor.authorVan Bael, Marlies
dc.contributor.authorHardy, An
dc.contributor.authorVan den Rul, Heidi
dc.contributor.authorMullens, J.
dc.date.accessioned2021-10-16T20:23:52Z
dc.date.available2021-10-16T20:23:52Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13011
dc.sourceIIOimport
dc.titleMetal oxide thin films by CSD of water-based solutions of carboxylate complexes
dc.typeOral presentation
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorHardy, An
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.source.peerreviewno
dc.source.conferenceInternational Conference on Chemical Solution Deposition - ICCSD
dc.source.conferencedate14/06/2007
dc.source.conferencelocationBerchtesgaden Germany
imec.availabilityPublished - imec


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