Show simple item record

Fabrication scheme for the in-situ mechanical characterization of freestanding MEMS structural layers, applied to Poly-SiGe

dc.contributor.authorVan Barel, Greg
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorDu Bois, Bert
dc.contributor.authorVerbist, Agnes
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-16T20:24:14Z
dc.date.available2021-10-16T20:24:14Z
dc.date.issued2007-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13012
dc.sourceIIOimport
dc.titleFabrication scheme for the in-situ mechanical characterization of freestanding MEMS structural layers, applied to Poly-SiGe
dc.typeMeeting abstract
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.source.peerreviewno
dc.source.beginpage1
dc.source.endpage2
dc.source.conferenceMaterials for Advanced Metallization - MAM
dc.source.conferencedate4/03/2007
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record